Abstract
The potential of ultrafast laser machining for the design of integrated optical devices in ULE (R) glass, a material known for its low coefficient of thermal expansion (CTE), is addressed. This was done through laser direct writing and characterization of optical waveguides and through the fabrication of 3D cavities inside the glass by following laser irradiation with chemical etching. Type I optical waveguides were produced and their internal loss mechanisms at 1550 nm were studied. Coupling losses lower than 0.2 dB cm-1 were obtained within a wide processing window. However, propagation loss lower than 4.2-4.3 dB cm-1 could not be realized, unlike in other glasses, due to laser-induced photodarkening. Selective-induced etching was observed over a large processing window and found to be maximum when irradiating the glass with a fs-laser beam linearly polarised orthogonally to the scanning direction, akin to what is observed in fused silica laser-machined microfluidic channels. In fact, the etching selectivity and surface roughness of laser-machined ULE (R) glass was found to be similar to that of fused silica, allowing some of the already reported microfluidic and optofluidic devices to be replicated in this low CTE glass. An example of a 3D cavity with planar-spherically convex interfaces is given. Due to the thermal properties of ULE (R) glass, these cavities can be employed as interferometers for wavelength and/or temperature referencing.

Abstract
Low-finesse Fabry-Perot interferometers (FPI) with a plano-convex geometry are fabricated in ULE (R) glass through ultrafast laser machining. With this geometry, it is possible to overcome beam divergence effects that contribute to the poor fringe visibility usually observed in 100-mu m or longer planar-planar FPIs. By replacing the planar surface with a spherical one, the diverging beam propagating through the cavity is re-focused back at the entrance of the lead-in fiber upon reflection at this curved interface, thereby balancing out the intensities of both interfering beams and enhancing the visibility. The design of a 3D shaped cavity with a spherical sidewall is only made possible through fs-laser direct writing followed by chemical etching. In this technique, the 3D volume is reduced to writing of uniformly vertically spaced 2D layers with unique geometry, which are then selectively removed during chemical etching with HF acid. The radius of curvature that maximizes fringe visibility is computed using a numerical tool that is experimentally validated. By choosing the optimal radius of curvature, uniform visibilities in the range of 0.98-1.00 are measured for interferometers produced with cavity lengths spanning from 100 to 1000 mu m.

Abstract
Optical microbubble resonators (OMBRs)-understood as localized thin wall bulges induced in silica microcapillaries-are gaining an ever-growing interest in microfluidic sensing applications due to their capability to sustain whispering gallery modes (WGMs) and confine the fluidic sample within their own hollow-core microcavity. Currently, most applications use an external tapered optical fiber for coupling light to the resonator. This arrangement is known to be fragile and prone to vibrations. In this work, an alternative approach, based on coupling OMBR with a femtosecond (fs) laser-written optical waveguides, integrated at the surface of fused silica substrate, is proposed. In this configuration, a stable and robust final structure is accomplished by gluing the two ends of the microcapillary, on which the OMBR is made, to the substrate. The OMBR quality factors, measured at the excitation wavelength of 1540 nm, show values close to 10(4) in the case of a water-filled cavity, with a maximum coupling efficiency of up to 6.5%. Finally, the operation of the integrated optical devices as refractometers is demonstrated by delivering different solutions with successively increasing concentrations of NaCl inside the OMBR. An average sensitivity of 45 nm/RIU is obtained, yielding a resolution of 4.4x10(-5) RIU, creating the potential for this platform to be applied in chemical/biochemical sensing.

Abstract
This study reports the fabrication of three-dimensional microfluidic channels in fused silica, using femtosecond laser micromachining, to achieve two-dimensional hydrodynamic flow focusing in either the horizontal or the vertical directions. Spatial focusing of 3 µm polystyrene particles was successfully demonstrated, showing the ability of the fabricated devices to confine microparticles within a 6 µm layer over a channel width of 420 µm and within a 5 µm layer over a channel height of 260 µm. Integration of laser-direct written optical waveguides inside a microfluidic chip and orthogonal to the channel also enabled the implementation of a dual-beam optical trap, with trapping of polystyrene microparticles using a 1550 nm beam being demonstrated.

Abstract
This work addresses the fabrication of straight silica-core liquid-cladding suspended waveguides inside a microfluidic channel through fs-laser micromachining. These structures enable the reconfiguration of the waveguide's mode profile and enhance the evanescent interaction between light and analyte. Further, their geometry resembles a tapered optical fiber with the added advantage of being monolithically integrated within a microfluidic platform. The fabrication process includes an additional post-processing thermal treatment responsible for smoothening the waveguide surface and reshaping it into a circular cross-section. Suspended waveguides with a minimum core diameter of 3.8 mu m were fabricated. Their insertion losses can be tuned and are mainly affected by mode mismatch between the coupling and suspended waveguides. The transmission spectrum was studied and it was numerically confirmed that it consists of interference between the guided LP01 mode and uncoupled light and of modal interference between the LP01 and LP02 modes.