Abstract
Optical fiber Mach-Zehnder interferometers were fabricated by combining two TiO2 coated LPFGs fabricated through femtosecond laser direct writing. Results of its refractometric characterization are presented and compared with the single LPFGs sensors. Wavelength sensitivity of 1175 nm/RIU at 1.38 and spectral resolution of 2.2×10-5 were achieved. © 2021 The Author(s).

Abstract
The potential of ultrafast laser machining for the design of integrated optical devices in ULE (R) glass, a material known for its low coefficient of thermal expansion (CTE), is addressed. This was done through laser direct writing and characterization of optical waveguides and through the fabrication of 3D cavities inside the glass by following laser irradiation with chemical etching. Type I optical waveguides were produced and their internal loss mechanisms at 1550 nm were studied. Coupling losses lower than 0.2 dB cm-1 were obtained within a wide processing window. However, propagation loss lower than 4.2-4.3 dB cm-1 could not be realized, unlike in other glasses, due to laser-induced photodarkening. Selective-induced etching was observed over a large processing window and found to be maximum when irradiating the glass with a fs-laser beam linearly polarised orthogonally to the scanning direction, akin to what is observed in fused silica laser-machined microfluidic channels. In fact, the etching selectivity and surface roughness of laser-machined ULE (R) glass was found to be similar to that of fused silica, allowing some of the already reported microfluidic and optofluidic devices to be replicated in this low CTE glass. An example of a 3D cavity with planar-spherically convex interfaces is given. Due to the thermal properties of ULE (R) glass, these cavities can be employed as interferometers for wavelength and/or temperature referencing.

Abstract
Low-finesse Fabry-Perot interferometers (FPI) with a plano-convex geometry are fabricated in ULE (R) glass through ultrafast laser machining. With this geometry, it is possible to overcome beam divergence effects that contribute to the poor fringe visibility usually observed in 100-mu m or longer planar-planar FPIs. By replacing the planar surface with a spherical one, the diverging beam propagating through the cavity is re-focused back at the entrance of the lead-in fiber upon reflection at this curved interface, thereby balancing out the intensities of both interfering beams and enhancing the visibility. The design of a 3D shaped cavity with a spherical sidewall is only made possible through fs-laser direct writing followed by chemical etching. In this technique, the 3D volume is reduced to writing of uniformly vertically spaced 2D layers with unique geometry, which are then selectively removed during chemical etching with HF acid. The radius of curvature that maximizes fringe visibility is computed using a numerical tool that is experimentally validated. By choosing the optimal radius of curvature, uniform visibilities in the range of 0.98-1.00 are measured for interferometers produced with cavity lengths spanning from 100 to 1000 mu m.